INHOMOGENEOUS THIN-FILM OPTICAL FILTERS FABRICATED USING GLANCING ANGLE DEPOSITION

Authors
ROBBIE K HNATIW AJP BRETT MJ MACDONALD RI MCMULLIN JN
Citation
K. Robbie et al., INHOMOGENEOUS THIN-FILM OPTICAL FILTERS FABRICATED USING GLANCING ANGLE DEPOSITION, Electronics Letters, 33(14), 1997, pp. 1213-1214
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
33
Issue
14
Year of publication
1997
Pages
1213 - 1214
Database
ISI
SICI code
0013-5194(1997)33:14<1213:ITOFFU>2.0.ZU;2-3
Abstract
A novel method for fabricating inhomogeneous thin film optical interfe rence filters is discussed. Glancing angle deposition (GLAD) and subst rate motion are used to create a single material thin film with period ic index variation as a function of thickness, Filters fabricated with this technique promise to be much simpler and cheaper to produce and to have much lower stress than interference filters fabricated with ot her techniques.