HIGH-DELTA-N SILICA-ON-SILICON CHANNEL WAVE-GUIDES BASED ON SOL-GEL GERMANOPHOSPHOSILICATE GLASS

Authors
SYMS RRA SCHNEIDER VM HUANG W AHMAD MM
Citation
Rra. Syms et al., HIGH-DELTA-N SILICA-ON-SILICON CHANNEL WAVE-GUIDES BASED ON SOL-GEL GERMANOPHOSPHOSILICATE GLASS, Electronics Letters, 33(14), 1997, pp. 1216-1217
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
33
Issue
14
Year of publication
1997
Pages
1216 - 1217
Database
ISI
SICI code
0013-5194(1997)33:14<1216:HSCWBO>2.0.ZU;2-O
Abstract
A process for fabrication of high-Delta n silica-on-silicon channel wa veguides by spin-coating and rapid thermal annealing of sol-gel german ophosilicate glass is described. A recipe for the preparation of stabl e sols and a parameter range for deposition of crack-free films are gi ven. Low and spectrally flat insertion loss is demonstrated for single mode guides with a Delta n of 1.5 x 10(-2).