Rvvvj. Rao et al., CHARACTERISTICS OF GAAS MISFET DEVICES USING LOW-TEMPERATURE-GROWN AL0.3GA0.7AS AS GATE INSULATOR, Electronics Letters, 33(14), 1997, pp. 1258-1260
Al0.3Ga0.7As epilayers grown at low-temperature (LT) by molecular beam
epitaxy (MBE) were used as insulators in the fabrication of MISFET de
vices. An LT-Al0.3Ga0.7As MISFET, having a gate length of 2 mu m, exhi
bited a transconductance of 161mS/mm, an I-DSS of 320mA/mm and a maxim
um drain voltage of 44.7V, resulting in an I-V product of 1.65W/mm; it
displayed improved frequency dispersion characteristics over that of
an LT-GaAs MISFET.