Well-aligned carbon nanotube array synthesized at low temperature by microwave plasma enhanced chemical vapor deposition

Well-aligned nanotubes with diameter of 30-50 nm have been synthesized on a porous alumina template by microwave plasma enhanced chemical vapor deposi tion (MW-PECVD), By this means, the control over either diameter or length of the nanotubes could be realized. The hollow structure and vertically ali gned features have been verified by scanning electron and transmission elec tron microscopic-images Tn comparison with the reported fabrication methods , lower synthesis temperature (below 520 degreesC) and simpler process (no negative de bias applied) have been achieved, which could be of great impor tance for both theoretical research and pratical applications.