STRUCTURE AND PROPERTIES OF FE-CONTAINING POLYMER COMPOSITE FILMS PREPARED BY PEMOCVD

Authors
WEN XG ZHOU KL ZHANG Y CAO WM
Citation
Xg. Wen et al., STRUCTURE AND PROPERTIES OF FE-CONTAINING POLYMER COMPOSITE FILMS PREPARED BY PEMOCVD, Thin solid films, 303(1-2), 1997, pp. 146-150
Citations number
7
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
303
Issue
1-2
Year of publication
1997
Pages
146 - 150
Database
ISI
SICI code
0040-6090(1997)303:1-2<146:SAPOFP>2.0.ZU;2-K
Abstract
Composite Fe-containing polymer films have been prepared by the plasma -enhanced metal-organic chemical vapor deposition (PEMOCVD), using fer rocene (Cp2Fe) and H-2/Ar as precursor and working gas respectively. T he structure and properties of films was characterized by X-ray photoe lectron spectroscopy, Auger electron spectroscopy, transmission electr on microscopy, transmission electron diffraction, and X-ray diffractio n. The electrical and optical properties of the films were also invest igated. The results show the films consist of microcrystalline Fe2O3 a nd Fe-C clusters embedded in an amorphous polymer matrix. The filling factor (f) of Fc affects the structure and properties of films greatly . (C) 1997 Elsevier Science S.A.