Composite Fe-containing polymer films have been prepared by the plasma
-enhanced metal-organic chemical vapor deposition (PEMOCVD), using fer
rocene (Cp2Fe) and H-2/Ar as precursor and working gas respectively. T
he structure and properties of films was characterized by X-ray photoe
lectron spectroscopy, Auger electron spectroscopy, transmission electr
on microscopy, transmission electron diffraction, and X-ray diffractio
n. The electrical and optical properties of the films were also invest
igated. The results show the films consist of microcrystalline Fe2O3 a
nd Fe-C clusters embedded in an amorphous polymer matrix. The filling
factor (f) of Fc affects the structure and properties of films greatly
. (C) 1997 Elsevier Science S.A.