The authors ivestigate the Schottky barrier heights of Ti films deposi
ted on n-type GaN. The effective barrier height Phi(b0) is measured by
current-voltage measurements, against temperature. An increasing barr
ier height Phi(b0) from similar to 200meV (as-deposited) to 250meV aft
er annealing at temperatures as low as 60 degrees C is observed. After
annealing at 230 degrees C and above, a stable Phi(b0) of 450meV is m
easured. The increase in Phi(b0) is not due to any macroscopic interfa
cial reaction.