Membrane-supported CPW with mounted active devices

This paper reports the fabrication of printed circuit lines on a 5 mum thic k membrane that minimizes dielectric loss and effectively eliminates surfac e modes, both of which are important for operation at millimeter-wave and s ubmiliimeter-wave frequencies, The relatively low-cost low-temperature proc ess uses a photosensitive resin (SU-8) to form the membrane and enables dev ices to be mounted on it.