Ferroelectric lead zirconate titanate films prepared by spray pyrolysis ofcarboxylate solutions

Ferroelectric PbTi0.6Zr0.4O3 films 0.5-1.5 mum in thickness were produced o n platinum substrates by spray pyrolysis of carboxylate solutions. The opti mized compositions of the precursor solutions, containing methacrylic acid and ethylene glycol, are stable under normal conditions, allow the annealin g temperature to be reduced, and lead to higher quality film surfaces and l arge grains. The film exhibit the following electrical properties: T-C = 36 0-460 degreesC, epsilon (max) = 1750 at T-C, tan delta = 0.02-0.1 at 1 kHz and room temperature, P-Smax = 18 muC/cm(2), P-rmax = 15 muC/cm(2) at 50 Hz , and E-c = 42-120 kV/cm.