Thin films of La0.67Sr0.33 MnO3 (LSMO) have been deposited using liquid-del
ivery metal-organic chemical vapor deposition (MOCVD). X-ray diffraction (X
RD) 2 theta/theta scans showed that all the films has a cubic structure. St
udies of the in-plane crystallographic orientations (pole figure) revealed
an (0 0 1) preferred growth structure on LAO, a weak (1 1 0) texture on Y-Z
rO2 (YSZ), a random texture on sapphire (SAP) and silicon (Si). Our attenti
on is focused on residual strain and its deviations from linearity for epsi
lon (phi,Psi) vs. sin(2)Psi plots. The strain evolution from 0<sin(2)<Psi><
0.8 showed a curvature and a "snake-like" pattern. These anomalies are attr
ibuted to texture and strain gradients. In-plane strain decreased as the la
ttice mismatch increased and varied from 0.05 to 3.03% depending on the sub
strate. An attempt is made to establish a relationship between lattice mism
atch, growth process, and residual strain. (C) 2001 Kluwer Academic Publish
ers.