Writing an arbitrary non-periodic pattern using interference lithography

Authors
Pau, S Watson, GP Nalamasu, O
Citation
S. Pau et al., Writing an arbitrary non-periodic pattern using interference lithography, J MOD OPT, 48(7), 2001, pp. 1211-1223
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
JOURNAL OF MODERN OPTICS
ISSN journal
09500340 → ACNP
Volume
48
Issue
7
Year of publication
2001
Pages
1211 - 1223
Database
ISI
SICI code
0950-0340(200106)48:7<1211:WAANPU>2.0.ZU;2-W
Abstract
We propose a technique to write non-periodic patterns using interference li thography. Arbitrary patterns in one and two dimension are constructed by c ontinuous scanning of multiple coherent sources at various incident angles and intensities.