P. Decorse et al., Chemical and structural characterization of La0.5Sr0.5MnO3 thin films prepared by pulsed-laser deposition, J VAC SCI A, 19(3), 2001, pp. 910-915
La0.5Sr0.5MnO3 thin films were deposited onto sapphire substrates by means
of the pulsed-laser deposition technique. These films were characterized by
several techniques including x-ray diffraction, Rutherford backscattering
spectrometry, energy-dispersive x-ray, atomic-force microscopy, scanning el
ectron microscopy, and x-ray photoelectron spectroscopy (XPS). The cation r
atios are the same in the deposited films as in the target. However, stront
ium segregation occurs at the film surface with an enrichment in this, elem
ent compared to Mn and La, as shown by XPS. In addition, a clear correlatio
n between the three different contributions which compose the O(1s) XPS sig
nal and the Sr, La, and Mn surface concentrations has been established. Ann
ealing the films at a sufficiently high-temperature produces the same cryst
al structure as in the target. (C) 2001 American Vacuum Society.