Numerical analyses of the micromirror for projection TV using FEM

This payer presents the modeling and the simulation of the new typed struct ure of the micromirror array for projection display application. An analyti cal description of electrostatically deflectable micromirrors is considered , and the structural, the modal, and the coupled-field analyses by means of a commercial FEM code, ANSYS, are performed. The structural analysis makes sure that the structure is reliable under its deflection, and the modal an alysis is executed to find the natural frequencies. The coupled-field analy sis gives a clue to predict a pull-in voltage for the device. The micromirr or array was fabricated, and some characteristics from experiments are comp ared with the results of the simulation.