The atomic force microscopy (AFM) was used to image nanoscale defect on InP
surface induced by 100 MeV Au8+ ions. These defects manifest themselves as
pits or hillocks in AFM images depending on the scan direction. The nuclea
r energy loss (S-n) of swift heavy ion was found to be a decisive parameter
for the creation of nanoscale defects, which otherwise supposed to be negl
ected at the surface for inelastic electronic energy loss (S-e) dominant pr
ocesses. (C) 2001 Elsevier Science B.V. All rights reserved.