A morphological study on the surface of epitaxial thin films of HoBa2Cu3O7-
delta was realized by atomic force microscopy. The films were grown using a
high-pressure sputtering technique. Chemical etching process with a nonaqu
eous solution of Br-ethanol was used to modify the thickness of the films.
The progress of morphology with thickness variation and the effect of the c
hemical etching on the film structure are discussed. (C) 2001 Elsevier Scie
nce B.V. All rights reserved.