Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires - art. no. 205318

The structure of self-organized quantum wires buried at the interfaces of a SiGe/Si multilayer is investigated by grazing incidence small-angle x-ray scattering. A nearly periodic distribution of wires, well described by a sh ort-range ordering model, gives rise to intensity satellite maxima in recip rocal space. The shape of the wire cross section is determined from the hei ghts of these intensity maxima, and the analysis reveals that the conventio nal step-bunching model is not sufficient to explain the wire shape.