V. Holy et al., Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires - art. no. 205318, PHYS REV B, 6320(20), 2001, pp. 5318
The structure of self-organized quantum wires buried at the interfaces of a
SiGe/Si multilayer is investigated by grazing incidence small-angle x-ray
scattering. A nearly periodic distribution of wires, well described by a sh
ort-range ordering model, gives rise to intensity satellite maxima in recip
rocal space. The shape of the wire cross section is determined from the hei
ghts of these intensity maxima, and the analysis reveals that the conventio
nal step-bunching model is not sufficient to explain the wire shape.