LaTiO3.5 is a layered compound made up of four LaTiO3 units: two regular pe
rovskite units stacked between two distorted units that share an additional
oxygen layer. In a single-crystalline thin film the (100) plane can be ali
gned parallel to the substrate surface, i.e., the additional oxygen layers
are inserted parallel to the substrate surface. A detailed structural chara
cterization reveals planar defects originating from substrate surface steps
. These results, in combination with the in situ reflection high-energy ele
ctron-diffraction observations, suggest an oxidation mechanism using such a
ntiphase boundaries as oxidation paths.