A MONOLITHIC SINGLE-CRYSTAL YTTRIUM IRON GARNET SILICON X-BAND CIRCULATOR/

Production of truly monolithic microwave integrated circuits that inco rporate ferrite passive control elements has been hindered by the mate rial property mismatches between ferrites and semiconductors. In this work, monolithic Y-junction circulators were fabricated by bonding 100 -mu m-thick single-crystal yttrium iron garnet films to silicon at 195 degrees C, and then removing the gadolinium gallium garnet substrate. S-parameter measurements on the circulator and matching microstrip ci rcuit yield an isolation of 20 dB over a 1-GHz bandwidth at 9 GHz, wit h a minimum insertion loss near 1 dB. Improvements in circuit design a nd fabrication techniques may yield monolithic circulators that are fu lly compatible with large-scale semiconductor manufacturing methods.