Electromagnetic micro-device realized by electrochemical way

Authors
Coutrot, AL Dufour-Gergam, E Martincic, E Gilles, JP Grandchamp, JP Quemper, JM Bosseboeuf, A Alves, F Ahamada, B
Citation
Al. Coutrot et al., Electromagnetic micro-device realized by electrochemical way, SENS ACTU-A, 91(1-2), 2001, pp. 80-84
Citations number
12
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
91
Issue
1-2
Year of publication
2001
Pages
80 - 84
Database
ISI
SICI code
0924-4247(20010605)91:1-2<80:EMRBEW>2.0.ZU;2-U
Abstract
In this paper, realization process and electroplated copper and permalloy p roperties are presented in order to fabricate micro-coils. RF electrical an d magnetic characterizations of the first devices with 40 turns obtained fo r low frequencies application are exposed showing an inductive behavior und er 220 MHz (L = 320 nH) and a capacitive behavior above. Experimental results are compared with calculations. A comparative magnetic field measurement is performed using micro-coils and AMR. (C) 2001 Elsevie r Science B.V. All rights reserved.