Modeling the characteristics of gas system dry-down

This article examiner techniques and theoretical modeling for determining t he suitability - particularly "dry-down" behavior - of different types of m aterials for the construction of gas distribution systems in a semiconducto r manufacturing facility. The tested material includes stainless steel and carbon steel tubes and pipes with various surface finishes. These tests als o include a straightforward approach for evaluating gas system valves, whic h are otherwise difficult to evaluate, with an equivalent piece of pipe tha t has a similar dry-down behavior. Results illustrate a strong temperature effect on outgassing of materials that have rough surface finishes.