Db. Thomasson et Tn. Jackson, HIGH-MOBILITY TRI-LAYER A-SI-H THIN-FILM TRANSISTORS WITH ULTRATHIN ACTIVE LAYER, IEEE electron device letters, 18(8), 1997, pp. 397-399
We show that hydrogenated amorphous silicon thin-film transistors (a-S
i:H TFT's) with active layer thickness of 13 nm perform better for dis
play applications than devices with thicker 50-nm active layers, A dir
ect comparison of a-Si:H TFT's fabricated using an i-stopper TFT struc
ture shows that ultrathin active layers significantly improve the devi
ce characteristics. For a 5-mu m channel length TFT, the linear region
(V-DS = 0.1 V) and saturation region mobilities increase from 0.4 cm(
2)/V.s and 0.7 cm(2)/V.s for a 50-nm thick active layer a-Si:H device
to 0.7 cm(2)/V.s and 1.2 cm(2)/V.s for a 13-nm thick active layer a-Si
:H layer device fabricated with otherwise identical geometry and proce
ssing.