Pure-silica zeolite low-k dielectric thin films

Authors
Wang, ZB Wang, HT Mitra, A Huang, LM Yan, YS
Citation
Zb. Wang et al., Pure-silica zeolite low-k dielectric thin films, ADVAN MATER, 13(10), 2001, pp. 746-749
Citations number
18
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
13
Issue
10
Year of publication
2001
Pages
746 - 749
Database
ISI
SICI code
0935-9648(20010517)13:10<746:PZLDTF>2.0.ZU;2-X