M. Belhaj et al., Analysis of two methods of measurement of surface potential of insulators in SEM: electron spectroscopy and X-ray spectroscopy methods, APPL SURF S, 177(1-2), 2001, pp. 58-65
We have measured the induced surface potential on single crystal of Al2O3 u
nder electron irradiation in scanning electron microscope (SEM), using X-ra
y spectroscopy method in conjunction with the electron spectroscopy method.
A big disagreement between the two methods is observed. The reason of this
disagreement is analysed, We show that the position of the experimentally
measured high energy cut-off limit of X-ray continuous radiation (bremsstra
hlung) detected from the charged sample is not consistent with the effectiv
e landing energy of the primary electrons and hence its position is not dir
ectly connected with the surface potential of the charged sample. (C) 2001
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