Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition

We have developed a method for biaxial texture determination in polycrystal line films using reflection high energy electron diffraction (RHEED) in-pla ne rocking curves. Experimental RHEED in-plane rocking curves were taken at 25 keV and 2.7 degrees incidence angle from 11 nm thick, nominally [1 0 0] -textured MgO films grown on amorphous Si3N4 by ion beam-assisted depositio n (IBAD). The experimental RHEED in-plane rocking curves were analyzed by c omparing them with RHEED inplane rocking curves calculated using a kinemati cal simulation. The model enables a quantitative correlation between biaxia l texture and RHEED in-plane rocking curve measurements. RHEED results are compared to X-ray rocking curve film analysis. (C) 2001 Elsevier Science B. V. All rights reserved.