Organic EL element manufacturing technologies

Key technologies necessary for fabricating organic EL elements are thin fil m technology of organic high/low molecular materials and hybrid technology of organic, inorganic and oxide films. For the creation of the organic laye rs (hole injection, hole transport, emission, and electron transport) the p rocesses can be divided into two types, wet and dry. Both processes require vacuum technology. In this paper, the basic concepts for the organic EL el ement manufacturing process and organic EL production systems using vacuum technology are described. (C) 2001 Elsevier Science B.V. All rights reserve d.