A novel air-bridge type gate-data line-crossover reducing signal delay forlarge-size TFT-LCD panel

A new gate-to-data line-crossover employing an air-bridge has been proposed and fabricated in order to reduce the line-crossing capacitance. The propo sed structure is composed of a low-dielectric air-gap between the gate and data line-crossover while the conventional one employs an oxide as a dielec tric material. The capacitance between the gate and data line in the TFT-LC D panel is decreased considerably due to the low-dielectric air-gap. The si gnal delay of new panel structure is reduced by about ten times compared wi th that of the conventional panel. The mechanical stability of the new pane l structure passivated with an oxide is comparable with the conventional on e.