The low-temperature poly-Si TFTs described here were fabricated on the Al/g
lass substrates by anodic oxidation of Al. An Al layer on glass substrates
can be used to control threshold voltage, improve stabilities, and suppress
the temperature rise due to self-heating. The Al layer on glass, thus, ass
uring the improved reliability of displays, using this type of TFT, effecti
vely suppressed the self-heating effect of poly-Si TFTs on glass. The thres
hold voltage of a TFT with an Al layer was more stable than that without an
Al layer. These results were supported by numerical analysis.