Double-crystal x-ray diffractometry of single crystals with microdefects

The known method of the 'integral' diffuse scattering has been generalized in the Bragg case of x-ray diffraction for crystals, which contain large mi crodefects commensurable with the extinction length. In the framework of th e developed statistical dynamical theory, relatively simple analytical expr essions have been derived for coherent and diffuse components of reflectivi ty of single crystals with randomly distributed microdefects. To test the characterization possibilities of the proposed method, the rock ing curves (RCs) of Czochralski-grown silicon single crystal annealed at 10 80 degreesC for 6 h have been measured for 111 and 333 reflections of Cu K- alpha1 radiation using a high-resolution double-crystal x-ray diffractomete r. The fitting results for the two RCs are in good mutual agreement and dem onstrate the high information ability of the method.