Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Authors
Mikulik, P Jergel, M Baumbach, T Majkova, E Pincik, E Luby, S Ortega, L Tucoulou, R Hudek, P Kostic, I
Citation
P. Mikulik et al., Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings, J PHYS D, 34(10A), 2001, pp. A188-A192
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN journal
00223727 → ACNP
Volume
34
Issue
10A
Year of publication
2001
Pages
A188 - A192
Database
ISI
SICI code
0022-3727(20010521)34:10A<A188:CANXRC>2.0.ZU;2-L
Abstract
Structural characterization of a fully etched amorphous W/Si multilayer gra ting with a lateral periodicity of 800 nm is performed by x-ray reflectivit y in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional rec iprocal space constructions were used to explain the scattering features re corded in both geometries. Coplanar coherent grating truncation rods were f itted by a dynamical theory for rough gratings. Comparison of the reflectiv ity from the reference planar multilayer completes the study.