Structural properties of Co/Gd multilayers grown by MBE on Si substrates wi
th and without a Si-N buffer are compared. The x-ray and TEM investigation
revealed a strong dependency of the structure on the existence of the buffe
r layer. The multilayers deposited on pure Si substrate show polycrystallin
e microstructure with significant correlation with respect to the distinct
crystallographic orientation related to the Si substrate. The structure dep
osited on the Si-N buffer can be described as amorphous. A strong mixing of
Co and Gd sublayers in samples deposited on Si-N can be concluded while th
e multilayer on Si seems to be formed with rather low intermixing. The stru
ctural difference between the studied samples was clearly reflected in thei
r respective magnetic properties.