For a better understanding of the mechanism of erosion by arcing, an accura
te method of quantifying the amount of material removed is required. To ach
ieve this, a Scanning White Light Interference Microscope was used to measu
re the shape and Volume of craters from their local depth profiles. The cra
ters were produced using single arcs with defined physical characteristics.
The investigations were carried out on the polished surfaces of various ma
terials, and in particular alloys and intermetallic compounds. The vertical
resolution of the interferometer used was of the order of 1 nm, while the
lateral resolution using white light was limited to ca. 0.5 mum. This permi
ts such craters to be measured quite accurately as their size generally var
ies between 20 and 500 nm in depth and 10 and 70 mum in diameter. A further
advantage of this method is that in multi-phase structures the individual
phases can be observed and the material loss can be distinguished between d
ifferent phases.