The preparation of TEM-specimens using Focused Ion Beam (FIB) systems

In recent years, the Focused ion Beam (FIB) Systems have been developed to now become important instruments in materials science. Their use, however, is still not widespread. This article reports on the possible uses of the F IB in the preparation of specimens for the Transmission Electron Microscope (TEM). Because of the ability to use the FIB as a microscope, it becomes p ossible to select areas for preparation only a few hundred nanometres in si ze. A further advantage compared with conventional methods of preparation i s also the relatively short preparation time this technique offers.