Theoretical limits of scanning white-light interferometry signal evaluation algorithms

Authors
Fleischer, M Windecker, R Tiziani, HJ
Citation
M. Fleischer et al., Theoretical limits of scanning white-light interferometry signal evaluation algorithms, APPL OPTICS, 40(17), 2001, pp. 2815-2820
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
APPLIED OPTICS
ISSN journal
00036935 → ACNP
Volume
40
Issue
17
Year of publication
2001
Pages
2815 - 2820
Database
ISI
SICI code
0003-6935(20010610)40:17<2815:TLOSWI>2.0.ZU;2-H
Abstract
Scanning white-light interferometry is widely used for the microstructure a nalysis of technical and biological specimens. For each pixel in the focal plane of the apparatus a white-light interferogram is acquired and evaluate d by means of an algorithm. We discuss some properties of mathematically op timal evaluation methods and the best possible achievable resolution derive d therefrom depending on the setup parameters. A comparison of the results to one of the algorithms described in the literature is given. (C) 2001 Opt ical Society of America.