Thin-film Y3-xAl5O12:Tb-x(3+) (YAG:Tb) phosphor derived from a sol-gel chem
istry is analyzed by x-ray diffraction, scanning electron microscopy, photo
luminescence (PL) and cathodoluminescence (CL). The metal alkoxides organic
precursors were chosen as the starting materials to form the sol-gel. This
liquid sol-gel was spin coated on sapphire and silicon substrates to form
the uniform thin films, then crystallized by annealing. The PL intensity of
the crystallized film at 545 nm green emission was 15 times higher than th
at of the as-coated noncrystalline film. CL measurements show that luminanc
e and efficiency are comparable to the films deposited by other techniques.
(C) 2001 American Institute of Physics.