Multilayers of anisotropically nanostructured silicon (Si) have been fabric
ated and studied by polarization-resolved reflection measurements. Alternat
ing layers having different refractive indices exhibit additionally a stron
g in-plane anisotropy of their refractive index (birefringence). Therefore,
a stack of layers, acting as a distributed Bragg reflector, has two distin
ct reflection bands, depending on the polarization of the incident linearly
polarized light. This effect is governed by a three-dimensional (in-plane
and in-depth) variation of the refractive index. These structures can yield
optical effects which are difficult to achieve with conventional Bragg ref
lectors. (C) 2001 American Institute of Physics.