Jh. Jang et al., Long wavelength metamorphic double heterojunction In0.53Ga0.47As/InAlGaAs/In0.52Al0.48As photodiodes on GaAs substrates, ELECTR LETT, 37(11), 2001, pp. 707-708
The design and performance of metamorphic InGaAs/InGaAlAs/InAlAs double het
erojunction photodiodes fabricated on GaAs substrates are presented. A low
dark current of 500pA at 5V bias, a responsivity of 0.6 A/W, and a -3 dB ba
ndwidth of 38 GHz for 1.55 mum light have been achieved by using a large ba
ndgap drift region in conjunction with a digitally graded bandgap layer.