Realization and thermal characterization of thin-film optothermal microsensor

The aim of this investigation is to study thin-film thermoelectric linear a rrays for high spatial temperature measurements and to analyze power laser energy profile. The sensitive area consists of a planar of 16 individual th in-film Au-Pd thermocouple junctions with 8 mum x 8 mum of surface area. Th is sensor allows 16 temperature measurements per 288 mum. It is processed b y means of standard integrated circuit techniques. Thermal simulation of he at conduction in gold and palladium layers has been carried out. The sensor thermoelectric response has been characterized in transient regime and ste ady state. The time constant of thermocouple response is of the order of 14 0 mus. A linear relationship between the thermoelectric voltage and the inc ident power laser has been put in evidence. Using the linear array, a Gauss ian profile of the incident laser beam is obtained.