J. Garcialopez et al., MECHANISM OF OXYGENATION OF YBACUO THIN-FILMS DURING IN-SITU GROWTH BY CATHODIC SPUTTERING - EFFECT OF ATOMIC OXYGEN, Journal of alloys and compounds, 251(1-2), 1997, pp. 94-98
The emphasis is on the study of the relationship between oxygen compos
ition, structure and electrical and physical properties of YBaCuO thin
films formed in situ at optimised conditions of sample deposition and
further submitted to the different conditions of sample cooling. For
this purpose the studies of oxygen content, depth concentration and of
oxygen order have been carried out using nuclear reaction analysis (N
RA), These results are correlated, on one hand, with the measurements
of atomic composition and structure by Rutherford backscattering spect
rometry, XRD and TEM and on the other hand by the measurements of the
electrical and physical properties T-c and surface resistance R-s. Mor
eover the mobility and the interface transfer coefficient (300-500 deg
rees C) of oxygen in c-axis oriented thin films of YBaCuO, have been e
valuated by in situ measurements using NRA. The fundamental and applie
d consequences of atomic oxygen for the mechanism of films growth is d
iscussed.