OXYGEN DEPTH PROFILING USING THE O-16(D,ALPHA)N-14 NUCLEAR-REACTION

The excitation function of the O-16(d,alpha)N-14 nuclear reaction has been determined in the deuteron energy range of 0.88-2.28 MeV. Major r esonances are observed at deuteron energies of 0.98, 1.31, 1.53, 1.60, 1.73 and 2.22 MeV. The present results show good agreement with those of Haase and Khubeis, however there is a shift of 60 keV in the first resonance compared with the measurements of Amsel. The use of a thin surface barrier detector (t = 22 mu m) and a bias voltage of +20 V cou pled with a proper pile-up rejection circuit has allowed the determina tion of the oxygen depth profiling to a resolution of 16 nm for thick targets. This method is efficient in eliminating interferences from ot her nuclear reactions such as O-16(d,p)O-17 and C-12(d,p)C-19, where e mitted protons have severely obscured alpha-particles from the O-16(d, alpha)N-14 reaction. A 1.08 MeV deuteron beam has been employed to inc rease the a-yield from the target. The target has been tilted at 70 de grees to enhance depth resolution. This reaction is well suited for th e determination of oxygen concentration in oxides of high temperature superconductors.