MOCVD PRECURSOR DESIGN ISSUES - RECENT ADVANCES IN THE CHEMISTRY AND VAPOR-PRESSURE CHARACTERISTICS OF (HEXAFLUOROACETYLACETONATE)(2)CENTER-DOT-POLYETHER COMPLEXES

This contribution presents synthetic, structural and volatility result s for a series of new Ba(hfa)(2).polyether (hfa=1,1,1,5,5,5-hexafluoro pentane-2,4-dionate) MOCVD precursors. The major emphasis of this stud y is on the synthesis and characterization of new Ba(hexafluoroacetyla cetonate)(2).polyether complexes as on well as elucidating relationshi ps between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of t he polyether structure.