Dj. Otway et al., PRECURSORS FOR CHEMICAL-VAPOR-DEPOSITION OF YTTRIUM BARIUM COPPER-OXIDE, Journal of alloys and compounds, 251(1-2), 1997, pp. 254-263
There exists a need for reproducible large area, high quality, thin fi
lms of YBa2Cu3O7-delta for insertion into magnetic resonance imaging a
nd cellular base station applications. One approach to the fabrication
of these films, chemical vapor deposition, currently has some limitat
ions placed upon it by the available range of precursor compounds. Thi
s report discusses the present commercial options, with an emphasis on
the effort demanded to qualify a specific compound for utilization in
a manufacturing environment.