MOCVD OF HTS AND GMR PEROVSKITES BY AEROSOL AND LIQUID DELIVERY MOCVD

Aerosol and liquid delivery MOCVD are techniques that were developed t o overcome the problems with thermally less stable alkaline earth meta l precursors in the deposition of alkaline earth doped HTS and GMR per ovskites. In this paper, we will discuss the advantages and disadvanta ges of these techniques compared to the conventional MOCVD process. Th e deposition of CeO2 films as an intermediate buffer layer for the dep osition of YBa2Cu3O7 on (1102) sapphire with Aerosol MOCVD will be dis cussed, as well as the deposition of alkaline earth doped lanthanum ma nganites, La1-xMxMnO3 (M=Ca, Sr) on LaAlO3, MgO and YSZ by liquid deli very MOCVD.