Single source MOCVD techniques were used to prepare perovskite films w
ith metallic conductivity (CaRuO3, LaNiO3, La0.5Sr0.5CoO3 and (La,Pr)(
0.7)(Sr,Ca)(0.3)MnO3). Structural and electric properties of the epita
xial layers on the coherent substrates are close to that of the films
grown by PLD and magnetron sputtering. Peculiarities of the growth occ
ur on the worse matched substrates, such as a mixture of two orientati
ons, each aligned in the plane of the interface (LaNiO3/MgO) and varia
nt structures in the films on YSZ. XRD of the films points to a pseudo
cubic lattice for all R(1-x)A(x)MO(3) films in spite of the distortion
s in the bulk material.