The calibration of the energy response of the detection elements for soft X
-ray spectrometer is reported. The calibration is carried out Beamline 3W1B
of Beijing Synchrotron Radiation Facility with beam intensity 40-80mA at e
lectron energy 2.2GeV, using vacuum chamber of reflectometer on An AXUV-100
silicon photodiode is used as the source intensity absolute monitor in the
photo energy rang 150-1500eV. The energy response curves for X-ray diode (
XRD) quantum efficiency,filter transmittance and grazing planar mirror refl
ection efficiency have been measured. Finally, the possible maximum errors
of the XRD at different energies are given based on these experimental data
.