Iron containing diamond-like amorphous carbon (a-C:Fe) films were deposited
by filtered cathodic vacuum arc technique. The influences of Fe content an
d substrate bias on the surface energy of the films were investigated. The
surface energy of a-C:Fe films was determined by the contact angle measurem
ent. Atomic force microscopy, Raman spectroscopy, and x-ray induced photoel
ectron spectroscopy were employed to analyze the origin of the variation of
surface energy with various Fe content and substrate bias. It is found tha
t the contact angle for water increases significantly after incorporating F
e into the films and the films become hydrophobic. The roughness of these f
ilms has no effect on the contact angle. The surface energy is reduced from
42.8 to 25 dyne/cm after incorporating Fe into the a-C film (10% Fe in the
target), which is due to the reduction of both dispersive and polar compon
ent. The reduction in dispersive component is ascribed to the decrease of a
tomic density of the a-C:Fe films due to the increase in sp(2) bonded carbo
n. When sp(2) content increases to some extent, the atomic density remains
constant and hence dispersive component does not change. The absorption of
oxygen on the surface plays an important role in the reduction of the polar
component for the a-C:Fe films. It is proposed that such network as (C-n-O
-Fe)-O-(Fe-O-C-n) may be formed and responsible for the reduction of polar
component. (C) 2001 American Institute of Physics.