A first experimental evidence of a significant tunneling magnetoresistance
signal of about 5% at 300 K for a magnetic tunnel junction consisting of ha
rd and soft magnetic layers separated by a 2 nm ZnS semiconducting barrier
is reported. The samples have been grown by sputtering on Si(111) substrate
at room temperature and have the following structure: Fe6 nmCu30 nmCoFe1.8
nmRu0.8 nmCoFe3 nmZnSxCoFe1 nmFe4 nmCu10 nmRu3 nm. The hard magnetic botto
m electrode consists of the artificial antiferromagnetic structure in which
the rigidity is ensured by the antiferromagnetic exchange coupling between
two FeCo layers through a Ru spacer layer. Barrier impedance scanning micr
oscope (BISM) measurements reveal a good homogeneity of the barrier thickne
ss. Electric transport measurements over square tunnel elements with latera
l sizes between 3 and 100 mum, exhibit a typical tunnel current-voltage var
iations and tunnel resistance of 2-3 k Ohm mum(2) with small variations whi
ch never exceed a factor of 2, which is in good agreement with the BISM res
ults. This good reproducibility of the junctions is very promising for MRAM
s and transistors applications. (C) 2001 American Institute of Physics.