Process window derivation with an application to optical media manufacturing

This paper derives the process window from quantitative pr-oc pss models. M ultidimensional clipping algorithms are developed that operate on half-spac es defined from the quality specifications. The resulting polytope is diffi cult to directly interpret. To support interactive tuning and optimization of manufacturing processes. three types of graphical matrices are presented to the decision maker: (1) the function matrix describes the relations bet ween the process parameters and the manufactured part quality attributes; ( 2) the process space illustrates the feasible processing space constrained by the product quality specifications; (3) the performance space provides t he feasible region of the part quality attributes and the Pareto Optimal se t corresponding to die processing space. Optimation of optical media manufa cturing is presented to demonstrate the use of the process window to locate LI feasible solution and proceed to a desired trade-off of multiple qualit y attributes.