Time variations of organic compound concentrations in a newly constructed cleanroom

Citation
C. Inoue et al., Time variations of organic compound concentrations in a newly constructed cleanroom, J IEST, 44(2), 2001, pp. 23-29
Citations number
6
Categorie Soggetti
Environmental Engineering & Energy
Journal title
JOURNAL OF THE IEST
ISSN journal
10984321 → ACNP
Volume
44
Issue
2
Year of publication
2001
Pages
23 - 29
Database
ISI
SICI code
1098-4321(200121)44:2<23:TVOOCC>2.0.ZU;2-T
Abstract
The concentration of organic compounds in a newly constructed cleanroom has been measured as a function of rime after completion of the interior finis h,cork. To identify the origin of organic contamination in the cleanroom, o utgassing tests of each construction material,were performed. The concentra tion of organic compounds in the cleanroom decreased rapidly during the fir st month after completing the interior finish work, and decreased gradually to a constant level after about four months. A primary source of the organ ic contamination was identified as 2-ethyl-1-hexanol generated from the pla sticizer used for vinyl curtains and floor materials. The concentration of organic compounds in the cleanroom can be estimated by using the outgassing rates of the compounds from each construction material and its area.