The concentration of organic compounds in a newly constructed cleanroom has
been measured as a function of rime after completion of the interior finis
h,cork. To identify the origin of organic contamination in the cleanroom, o
utgassing tests of each construction material,were performed. The concentra
tion of organic compounds in the cleanroom decreased rapidly during the fir
st month after completing the interior finish work, and decreased gradually
to a constant level after about four months. A primary source of the organ
ic contamination was identified as 2-ethyl-1-hexanol generated from the pla
sticizer used for vinyl curtains and floor materials. The concentration of
organic compounds in the cleanroom can be estimated by using the outgassing
rates of the compounds from each construction material and its area.