Microstructure of Co-CoO obliquely evaporated tape was studied by energy-fi
ltered electron microscopy combined with high-resolution electron microscop
y. Elemental mapping with electron energy-loss spectroscopy revealed that t
he specimen had a columnar internal structure, in which two types of column
s, i.e. Co-rich and O-rich ones, were present. They were identified to be t
he columns containing mainly Co and CoO, respectively, by image processing
of high-resolution electron microscope images. Although the size of Co part
icles was small, i.e. 5-20 nm, several particles gathered to form clusters
within each Co-rich column. The c-axis of the particles inside the cluster
was almost parallel to the longitudinal direction of the Co-rich column.