High-resolution nano area analysis of plate like precipitate in aluminum alloy employed with Z-contrast and drift corrected EDS mapping

The HAADF(High Angle Annular Dark Field) method and EDS(Energy Dispersive X -ray Spectrometer) analysis by the FE-STEM have been used in various resear ch fields. The observation of the atomic level is possible by the high reso lution Z-contrast image in the HAADF method. Recently, in the EDS system, t he drift correction EDS mapping system was developed. And long time element al mapping becomes possible by using this system and high-resolution two-di mensional elemental distribution images has come to obtained. In this paper, The Plate like precipitate called Omega phase in Al alloy as analyzed by using those methods. As a result, The distribution of Ag in th e interface between matrix and Omega phase were observed is smaller than 1 nm. Two-dimension distribution image of the atomic layer order was obtained by using those method.