The automation of micro assembly is becoming more and more important in mic
ro technology. Especially the demands on handling and process observation o
f hybrid microsystems with optical and mechanical functions are quite high.
Because of this process monitoring is inevitably necessary for a better un
derstanding of what is really happening in the micro world. Process visuali
sation is very important in MEMS (Micro Electronic and Mechanical Systems)
but does not guarantee an operative micro system. Therefore, instruments fo
r quality control are required to secure a safe and reproducible assembly.
The aim of this article is to illustrate the need for inspection systems. A
lso to give an overview over used and new devices for process observation a
nd quality control. Finally, a newconcept of a modular in-line observation
system (MILOS) is presented. (C) 2001 Elsevier Science Ltd. All rights rese
rved.