Quality control and process observation for the micro assembly process

Citation
T. Pfeifer et al., Quality control and process observation for the micro assembly process, MEASUREMENT, 30(1), 2001, pp. 1-18
Citations number
21
Categorie Soggetti
Instrumentation & Measurement
Journal title
MEASUREMENT
ISSN journal
02632241 → ACNP
Volume
30
Issue
1
Year of publication
2001
Pages
1 - 18
Database
ISI
SICI code
0263-2241(200107)30:1<1:QCAPOF>2.0.ZU;2-T
Abstract
The automation of micro assembly is becoming more and more important in mic ro technology. Especially the demands on handling and process observation o f hybrid microsystems with optical and mechanical functions are quite high. Because of this process monitoring is inevitably necessary for a better un derstanding of what is really happening in the micro world. Process visuali sation is very important in MEMS (Micro Electronic and Mechanical Systems) but does not guarantee an operative micro system. Therefore, instruments fo r quality control are required to secure a safe and reproducible assembly. The aim of this article is to illustrate the need for inspection systems. A lso to give an overview over used and new devices for process observation a nd quality control. Finally, a newconcept of a modular in-line observation system (MILOS) is presented. (C) 2001 Elsevier Science Ltd. All rights rese rved.